High Precision Air-Conditioning Units
Sensitive processes in semiconductor manufacturing require extremely precise air conditions in the close vicinity of the wafer. M+W Zander offers high precision air-conditioning solutions to control air temperature, relative humidity, pressurization and airborne molecular contamination in the process environment within tightest specifications.
Based on decades of experience in ventilation and air-conditioning as well as in cleanroom technology for semiconductor manufacturing we have developed our own product line of high precision air handlers to control and maintain air temperature within milli Kelvins and relative humidity below 1 %. If required the pressurization can be maintained below 3 Pa.
For controlling airborne molecular contamination in the process environment we apply our chemical filters especially developed to control typical AMC in semiconductor manufacturing. Our product line includes air-conditioning units for steppers, air-conditioning modules to be integrated into coater/developer tracks or complete environmental chambers to house sensitive metrology equipment for wafer and mask inspection.
Our references include the leading semiconductor manufacturer as well as the advanced process tool manufacturer. Together with our customers in very close cooperation we develop, test and evaluate customized high precision air-conditioning components and systems and manufacture them in series production. Our products and systems are tested and certified together with the process tools of our customers (SEMI, UL, CSA). High quality standards require the manufacturing, assembly, testing and packing of our products under cleanroom conditions. Each system and unit is run through a extensive test program prior to shipping. All test results are documented to prove the specifications and the performance of our products at the end user site.
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